Publication

2021
11. (poster) Ae Jin Lee, Byung Seok Kim, Ji Hyeon Hwang, Dong Hee Han, and Woojin Jeon "Optimizing the laminated structure of high-k dielectric consisting of ZrO2 and HfO2 for Dynamic Random Access Memory capacitor", The 28th Korean Conference on Semiconductors, (virtual) Korea (28th Jan. 2021)
10. (poster) Ye Won Kim, Byung Seok Kim, Dae Cheol Lee, and Woojin Jeon "Atomic layer deposition of MoO2 as thermally stable conductive oxide for the metal electrode for the next generation DRAM capacitor", The 28th Korean Conference on Semiconductors, (virtual) Korea (28th Jan. 2021)
9. (poster) Dong Hee Han, Ji Hyeon Hwang, and Woojin Jeon "Investigation of the frequency dependent dielectric characteristics of ZrO2 based high-k dielectrics", The 28th Korean Conference on Semiconductors, (virtual) Korea (28th Jan. 2021)
8. (poster) Ji Hyeon Hwang, Minsung Kim, Youngjin Kim, Eui Young Jung, Sang-Soo Lee, and Woojin Jeon
"Complementary Resistive Switching Characteristics based on Silver Nanoparticles Embedded Zirconium Oxide Using Atomic Layer Deposition", The 28th Korean Conference on Semiconductors, (virtual) Korea (28th Jan. 2021)
7. (poster) Jenam Kim, Byung Seok Kim, Ae Jin Lee, and Woojin Jeon "Enhancing the electrical properties of ALD-grown homogeneous ZrxHf1-xO2 thin film by CpZr-CpHf cocktail precursor using liquid deliverysystem", The 28th Korean Conference on Semiconductors, (virtual) Korea (28th Jan. 2021)
6. (poster) Byung Seok Kim, Ji Hyeon Hwang, Dong Hee Han, and Woojin Jeon "Improved interface properties of ZrO2-TiN using passivation layer to suppress interfacial layer caused degradation", The 28th Korean Conference on Semiconductors, (virtual) Korea (28th Jan. 2021)
2020
5. (poster) Eui Young Jung, Jeongil Bang, Haeryong Kim, Dong Hee Han, and Woojin Jeon1, "Initial Growth Behavior of Atomic Layer Deposited TiO2 Thin Film Depending on the Chemistry of Ru Substrate", The 27th Korean Conference on Semiconductors, Gangwon,  Korea (14th Feb. 2020)
kcs2020_abstract_jung_eui_young.pdf
File Size: 218 kb
File Type: pdf
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4. (poster) Byoung Seok Kim, Ye Won Kim, Ae Jin Lee, Jenam Kim, and Woojin Jeon, "Enhancing the Growth Rate of ALD-grown TiO2 Thin Film by Modulating the Chemisorption Characteristic using Physisorbed H2O", The 27th Korean Conference on Semiconductors, Gangwon,  Korea (14th Feb. 2020)
kcs2020_abstract_byoung_seok_kim_r1.pdf
File Size: 166 kb
File Type: pdf
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2019
3. (invited) Woojin Jeon, "Recent Progress in High-k Dielectric Investigation for DRAM Capacitor Application Deposited by Atomic Layer Deposition", K-ALD Workshop 2019, Hanyang Univ., Seoul, Korea (26 Apr. 2019)
abstract_k-ald2019_wjeon.pdf
File Size: 54 kb
File Type: pdf
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2. (invited) Woojin Jeon, "Development of atomic layer deposition process on 2D materials and for 2D materials", UTD-KMU In-FUSION Center Workshop, Kookmin Univ., Seoul, Korea (22 Mar. 2019)
kmu-utd_workshop_20190322.pdf
File Size: 277 kb
File Type: pdf
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1. (invited) Woojin Jeon, "New Perspectives in Atomic Layer Deposition Technique for 2D Material Thinfilm Deposition and Thinfilm Deposition on 2D Materials", The 26th Korean Conference on Semiconductor, Gangwon, Korea (14 Feb. 2019)
kcs2019_wjeon_abstract.pdf
File Size: 983 kb
File Type: pdf
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Lab. of Electronic-Materials Tech. & Eng. (L'ete)
Dept. of Advanced Materials Engineering for Information & Electronics, Kyung Hee University (c) 2018